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Piezoelectric MEMS Resonator Technology with Integrated Phase Change Material Switches
Published: 12/17/2015
|
Inventor(s):
Matteo Rinaldi
,
Gwendolyn Hummel
Keywords(s):
Devices
,
Electronics
,
RF (Radio Frequency)
Category(s):
2. Physical Science > Electronics/Semiconductors
,
-Devices