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Piezoelectric MEMS Resonator Technology with Integrated Phase Change Material Switches

Published: 12/17/2015 | Inventor(s): Matteo Rinaldi, Gwendolyn Hummel
Keywords(s): Devices, Electronics, RF (Radio Frequency)
Category(s): Electronics, Devices
Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material

Published: 12/17/2015 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian
Keywords(s): Materials, Mechanical, MEMS, Nanotechnology, Sensor Technology
Category(s): Sensor Technology, Chemistry, Materials, 1. Life Science > Nanotechnology
Piezoelectric Nanomechanical Infrared/THz Detector Based on an ALN Nano-Plate Resonator

Published: 8/20/2014 | Inventor(s): Matteo Rinaldi, Yu Hui
Keywords(s): Detection, Devices, Electronics, Equipment, Homeland Security, Imaging, Imaging Technology, Radar, Security, Sensor Technology, Software, Software and Algorithms
Category(s): Energy Technology, Electronics, Imaging Technology, Materials, Devices, Security, Sensor Technology, Equipment, Homeland Security, 1. Life Science > Nanotechnology
Combined Mode of Vibration Aluminum Nitride Micro-Electro-Mechanical Resonator with High Electromechanical Coupling Coefficient

Published: 8/20/2014 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian
Keywords(s): Devices, Electromagnetics, Energy Technology, Radioactive, RF (Radio Frequency), Sensor Technology
Category(s): Energy Technology, Sensor Technology, Devices, Electronics

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