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Nano- And Microelectromechanical Resonators

Published: 1/20/2021 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian, Cristian Cassella
Keywords(s):
Category(s): -Nanotechnology, 2. Physical Science > Electronics/Semiconductors
Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material

Published: 12/17/2015 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian
Keywords(s): Materials, Mechanical, MEMS, Nanotechnology, Sensor Technology
Category(s): -Chemistry, -Materials, -Nanotechnology, -Sensors tech
Combined Mode of Vibration Aluminum Nitride Micro-Electro-Mechanical Resonator with High Electromechanical Coupling Coefficient

Published: 8/20/2014 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian
Keywords(s): Devices, Electromagnetics, Energy Technology, Radioactive, RF (Radio Frequency), Sensor Technology
Category(s): 2. Physical Science > Electronics/Semiconductors, -Devices, -Energy Technology, -Sensors tech

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