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Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material
Published: 12/17/2015
|
Inventor(s):
Matteo Rinaldi
,
Yu Hui
,
Zhenyun Qian
Keywords(s):
Materials
,
Mechanical
,
MEMS
,
Nanotechnology
,
Sensor Technology
Category(s):
Sensor Technology
,
Chemistry
,
Materials
,
1. Life Science > Nanotechnology
Combined Mode of Vibration Aluminum Nitride Micro-Electro-Mechanical Resonator with High Electromechanical Coupling Coefficient
Published: 8/20/2014
|
Inventor(s):
Matteo Rinaldi
,
Yu Hui
,
Zhenyun Qian
Keywords(s):
Devices
,
Electromagnetics
,
Energy Technology
,
Radioactive
,
RF (Radio Frequency)
,
Sensor Technology
Category(s):
Energy Technology
,
Sensor Technology
,
Devices
,
Electronics