Description:

COMBINED MODE OF VIBRATION ALUMINUM NITRIDE MICROELECTRO-MECHANICAL RESONATOR WITH HIGH ELECTROMECHANICAL COUPLING COEFFICIENT

INV-13078

INVENTORS:  Matteo Rinaldi, Yu Hui, Zhenyun Qian

Link to PDF

Description

Conventional Aluminum Nitride (ALN) Microelectro-Mechanical System (MEMS) resonators are associated with reduced electromechanical performances.  For these resonators (such as film bulk acoustic resonators and ALN contour-mode resonators) only a single mode of vibration is excited.  Moreover, the electromechanical coupling coefficient for existing resonators, which is a measure of the energy conversion efficiency, is extremely low.  This approach discloses the development and use of novel, miniaturized and high frequency ALN-MEMS resonators, addressing existing unmet technical and marketing needs.

 

Value Proposition

The resonators:

•Are highly compact

•Are associated with an improved electrochemical performance

•Are associated with an improved figure of merit and a lower power consumption

•Are further associated with enhanced CMOS and unique scaling capabilities

•Have a high quality factor and a low motional resistance as compared to conventional resonators

•Have high electromechanical coupling coefficients (2.5 – 3.5%) as compared to conventional resonators

•Enable excitation of both thickness and contour extensional modes as compared to single mode excitation in conventional resonators

•Enable self-sustained and compact MEMS-CMOS oscillations and low insertion loss as compared to conventional resonators

•Would be commercially useful for applications such as in RF communication, physical, chemical, and biosensors

 

Intellectual Property status

Provisional Application No. 61/814,742

License status

Available for license

Patent Information:
For Information, Contact:
Mark Saulich
Senior Commercialization Manager
Northeastern University
m.saulich@neu.edu
Inventors:
Matteo Rinaldi
Yu Hui
Zhenyun Qian
Keywords:
Devices
Electromagnetics
Energy Technology
Radioactive
RF (Radio Frequency)
Sensor Technology