Description:

PIEZOELECTRIC NANOMECHANICAL INFRARED/THZ DETECTOR BASED ON AN ALN NANOPLATE RESONATOR

INV-13079

INVENTORS: Matteo Rinaldi, Yu Hui

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Description

Conventional infrared (IR) detectors are based on semiconductor photon detection.  They need cryogenic cooling, making them bulky, costly and highly inconvenient to use.  On the other hand, uncooled IR thermal detectors based on bolometric principle have a slow response time and a poor detection limit.  This invention discloses the development and use of a novel, piezoelectric nanomechanical IR/THz detector based on a ALN nanoplate resonator, addressing existing unmet needs and limitations.

 

Value Proposition

The detector:

•Is ultra-miniaturized and cost effective

•Has a capability to selectively scan frequency regions of interest

•Uses a ALN-NEMS technology for high resolution portable IR/THz spectroscopy

•Comprises the use of compact and low power CMOS circuits for direct frequency readouts

•Enables a unique combination of an extremely high sensitivity with an ultra-low noise performance

•Exhibits a higher performance (quality factor Q ~2000) as compared to conventional detectors

•Has a high electromechanical coupling coefficient (~2%) as compared to conventional detectors

•Avoids use of mechanical moving mirrors and guarantees higher spatial resolution as compared to conventional techniques/systems

•Is ultra-fast and sensitive for sensing mass, fluid flow, temperature, and specific chemical or biological agents

•Would be commercially useful for the following applications:

o IR/THz imaging

o Spectroscopy

o Remote sensing

o Distributed environmental monitoring

o Defense and intelligence applications such as chemical biological threats detection, night vision, infrared homing, multicolor infrared seeking

o Healthcare applications such as pathogens and drugs detection/identification.

 

Intellectual Property status

Provisional Application No. 61814744

License status

Available for license

Patent Information:
For Information, Contact:
Mark Saulich
Senior Commercialization Manager
Northeastern University
m.saulich@neu.edu
Inventors:
Matteo Rinaldi
Yu Hui
Keywords:
Detection
Devices
Electronics
Equipment
Homeland Security
Imaging
Imaging Technology
Radar
Security
Sensor Technology
Software
Software and Algorithms