Description:

ALUMINIUM NITRIDE PIEZOELECTRIC NEMS DEVICES USING 2-DIMENSIONAL ELECTRODE MATERIAL

INV-13074

INVENTORS: Matteo Rinaldi, Zhenyun Qian, Yu Hui

 

Description       

Prior-art discloses the use of heavy and thick top metal electrodes to provide the excitation of electrical signals in case of piezo-electric nano-resonators. As a result, such resonators are associated with key functional limitations such as low performance, sensitivity, lower limit of detection as well as low detection speed.  This invention discloses the development and use of novel aluminum nitride (ALN) based piezoelectric NEMS/MEMS devices fabricated using ultra-low mass 2-dimensional electrically conductive electrode materials such as graphene and molybdenum disulfide, overcoming prior-art limitations and/or unmet needs.

Value Proposition

The device:

•Is extremely compact with reduced mass and volume

•Is associated with an improved sensitivity and noise performance

•Is capable of achieving unprecedented values of detection limit/speed

•Comprises the use of the thinnest and lightest conductive electrodes ever used with NEMS resonators

•Has an increased frequency of operation combined with a higher Q factor values as compared to conventional devices

•Has a tunable electrical conductivity, with capability to control the switching of electromechanical couplings

•Would be commercially useful for the following applications:

oUltra-sensitive and fast MEMS resonant chemical, physical and bio-sensors

oImplementation of high performance and intrinsically switchable filters and oscillators for IR/THz sensing and RF communications

 

 

Intellectual Property status

Provisional Application 61/828,227

 

License status

Available for license

 

Patent Information:
For Information, Contact:
Mark Saulich
Associate Director of Commercialization
Northeastern University
m.saulich@northeastern.edu
Inventors:
Matteo Rinaldi
Yu Hui
Zhenyun Qian
Keywords:
Materials
Mechanical
MEMS
Nanotechnology
Sensor Technology